The development and fabrication of highly innovative micro- and nanoelectronics becomes easy with smile2. E-beam lithography is getting more flexible and more precise.

Application Examples

Ultra complex structures

smile2 is a powerful tool which enables the fabrication of ultra complex structures with many millions of elements such as large-scale photonic crytals, metamaterials or other complex devices.  For the first time, procedural structures like fractals or diffraction patterns have been exposed with an accuracy down to the resolution limit of a few nanometers (previously only possible with the multimillion dollar devices).

High resolution

smile2 makes no compromise on resolution. Built-in features like dose profile optimization, proximity effect correction, and custom pattern generation make it possible to produce not only narrow long line patterns but also the huge amount of other nanometer sized structures which could not be done with other software.

Membranes

Fresnel lenses and profiles

Multi-layer and devices

Publications using smile2

Publication

Enhancement of the critical current of intrinsic Josephson junctions by carrier injection

Kizilaslan, O., Simsek, Y., Aksan, M.A., Koval, Y., Müller, P.
(2015) Superconductor Science and Technology, 28 (8), art. no. 085017
DOI: 10.1088/0953-2048/28/8/085017

Publication
Publication

Superconductivity induced by carrier injection into non-superconducting Bi2Sr2CaCu2O8+δ

Simsek, Y., Koval, Y., Gieb, K., Müller, P.
(2014) Superconductor Science and Technology, 27 (9), art. no. 095011
DOI: 10.1088/0953-2048/27/9/095011

Publication
Publication

Polymer surfaces graphitization by low-energy He+ ions irradiation

Geworski, A., Lazareva, I., Gieb, K., Koval, Y., Müller, P.
(2014) Journal of Applied Physics, 116 (6), art. no. 063715, . Cited 1 time.
DOI: 10.1063/1.4892986

Publication
Publication

Fabrication and characterization of glassy carbon membranes

Koval, Y., Geworski, A., Gieb, K., Lazareva, I., Müller, P.
(2014) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 32 (4), art. no. 042001
DOI: 10.1116/1.4890008

Publication
Publication

Statistical raman microscopy and atomic force microscopy on heterogeneous graphene obtained after reduction of graphene oxide

Eigler, S., Hof, F., Enzelberger-Heim, M., Grimm, S., Müller, P., Hirsch, A.
(2014) Journal of Physical Chemistry C, 118 (14), pp. 7698-7704. Cited 13 times
DOI: 10.1021/jp500580g

Publication
Publication

Statistical raman microscopy and atomic force microscopy on heterogeneous graphene obtained after reduction of graphene oxide

Koval, Y.
(2014) Applied Physics Letters, 105 (16), art. no. 163108
DOI: 10.1063/1.4900642

Publication
Publication

Graphene oxide: Efficiency of reducing agents

Eigler, S., Grimm, S., Enzelberger-Heim, M., Müller, P., Hirsch, A.
(2013) Chemical Communications, 49 (67), pp. 7391-7393. Cited 24 times
DOI: 10.1039/c3cc43612h

Publication
Publication

Wet chemical synthesis of graphene

Eigler, S., Enzelberger-Heim, M., Grimm, S., Hofmann, P., Kroener, W., Geworski, A., Dotzer, C., Röckert, M., Xiao, J., Papp, C., Lytken, O., Steinrück, H.-P., Müller, P., Hirsch, A.
(2013) Advanced Materials, 25 (26), pp. 3583-3587. Cited 53 times
DOI: 10.1002/adma.201300155

Publication
Publication

Formation and decomposition of CO 2 intercalated graphene oxide

Eigler, S., Dotzer, C., Hirsch, A., Enzelberger, M., Müller, P.
(2012) Chemistry of Materials, 24 (7), pp. 1276-1282. Cited 34 times
DOI: 10.1021/cm203223z

Publication