The development and fabrication of highly innovative micro- and nanoelectronics becomes easy with smile2. E-beam lithography is getting more flexible and more precise.
Application Examples
Ultra complex structures
smile2 is a powerful tool which enables the fabrication of ultra complex structures with many millions of elements such as large-scale photonic crytals, metamaterials or other complex devices. For the first time, procedural structures like fractals or diffraction patterns have been exposed with an accuracy down to the resolution limit of a few nanometers (previously only possible with the multimillion dollar devices).
High resolution
smile2 makes no compromise on resolution. Built-in features like dose profile optimization, proximity effect correction, and custom pattern generation make it possible to produce not only narrow long line patterns but also the huge amount of other nanometer sized structures which could not be done with other software.
Membranes
Fresnel lenses and profiles
Multi-layer and devices
Publications using smile2
Enhancement of the critical current of intrinsic Josephson junctions by carrier injection
Kizilaslan, O., Simsek, Y., Aksan, M.A., Koval, Y., Müller, P.
(2015) Superconductor Science and Technology, 28 (8), art. no. 085017
DOI: 10.1088/0953-2048/28/8/085017
Superconductivity induced by carrier injection into non-superconducting Bi2Sr2CaCu2O8+δ
Simsek, Y., Koval, Y., Gieb, K., Müller, P.
(2014) Superconductor Science and Technology, 27 (9), art. no. 095011
DOI: 10.1088/0953-2048/27/9/095011
Polymer surfaces graphitization by low-energy He+ ions irradiation
Geworski, A., Lazareva, I., Gieb, K., Koval, Y., Müller, P.
(2014) Journal of Applied Physics, 116 (6), art. no. 063715, . Cited 1 time.
DOI: 10.1063/1.4892986
Fabrication and characterization of glassy carbon membranes
Koval, Y., Geworski, A., Gieb, K., Lazareva, I., Müller, P.
(2014) Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 32 (4), art. no. 042001
DOI: 10.1116/1.4890008
Statistical raman microscopy and atomic force microscopy on heterogeneous graphene obtained after reduction of graphene oxide
Eigler, S., Hof, F., Enzelberger-Heim, M., Grimm, S., Müller, P., Hirsch, A.
(2014) Journal of Physical Chemistry C, 118 (14), pp. 7698-7704. Cited 13 times
DOI: 10.1021/jp500580g
Statistical raman microscopy and atomic force microscopy on heterogeneous graphene obtained after reduction of graphene oxide
Koval, Y.
(2014) Applied Physics Letters, 105 (16), art. no. 163108
DOI: 10.1063/1.4900642
Graphene oxide: Efficiency of reducing agents
Eigler, S., Grimm, S., Enzelberger-Heim, M., Müller, P., Hirsch, A.
(2013) Chemical Communications, 49 (67), pp. 7391-7393. Cited 24 times
DOI: 10.1039/c3cc43612h
Wet chemical synthesis of graphene
Eigler, S., Enzelberger-Heim, M., Grimm, S., Hofmann, P., Kroener, W., Geworski, A., Dotzer, C., Röckert, M., Xiao, J., Papp, C., Lytken, O., Steinrück, H.-P., Müller, P., Hirsch, A.
(2013) Advanced Materials, 25 (26), pp. 3583-3587. Cited 53 times
DOI: 10.1002/adma.201300155
Formation and decomposition of CO 2 intercalated graphene oxide
Eigler, S., Dotzer, C., Hirsch, A., Enzelberger, M., Müller, P.
(2012) Chemistry of Materials, 24 (7), pp. 1276-1282. Cited 34 times
DOI: 10.1021/cm203223z